UV Sensing Capabilities for TDI Imagers

Imec presents a high-speed UV-sensitive time-delay-integration (TDI) imager that is based on CCD-in-CMOS technology. 

The TDI imager has a quantum efficiency of more than 70% in the (near-)ultraviolet (UV) region, making it an appropriate tool for industrial machine vision, in particular inspection in semiconductor manufacturing processes. The sensors are manufactured on 200mm wafers by using the companys CCD process module inside its 130nm CMOS process flow. The resulting image sensors have a high sensitivity and speed (up to 300kHz line rate) and a low power consumption.