The system’s unique combination of optical spectroscopy and imaging technology enhances product and sample knowledge. It achieves laterally resolved determination of layer thicknesses ranging from as thin as single-digit nanometer up to 500µm, de-pending on the material. VEpioneer Micro also evaluates critical quality criteria such as defects, contaminations, processing status, and surface or interface roughness. Additionally, it offers deep insights into chemical, electrical, and optical sample properties. The system enables precise analysis of a wide range of material classes and sample types. Materials that can be analyzed include metals, glass, polymers, semiconductors such as silicon and silicon carbide, ceramics, as well as inorganic and organic compounds.
It utilizes a pushbroom scanning mode, featuring a CMOS or an InGaAs sensor for reflectance measurements across a wavelength range of 400 to 1,700nm. It provides high spectral resolution – 1.34nm in the VNIR range and 3.5nm in the SWIR range – with up to 448 spectral bands in VNIR and 224 in SWIR. Its field of view and spatial resolution can be adjusted based on select-ing an appropriate microscope objective, achieving resolutions less than 1µm. The microscope is equipped with a broadband light source for uniform illumination and supports sample sizes up to 100x100mm, with further customization options avail-able. Precision stage motion can be controlled manually via joystick or automatically with VEsolve Pro, and visual position control is ensured through a monochrome camera integrated into a secondary optical path. The system operates on a laptop or IPC running VEsolve Pro, the ML supported software, making it a powerful tool for advanced thin film- and surface inspection.
Summary
The VEpioneer Micro empowers both industry and research with next generation microscopy that defines new standards in sample analysis. It enables detailed exploration at the microscale and provides intelligent, fast, and reliable quality control – from semiconductors to microplastics
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